Inexpensive Microsensor Fabrication Process

Glenn's innovative nanoSSSD device includes a doped semiconducting substrate, an insulating layer deposited on the substrate, an electrode formed on the insulating layer, and at least one polymer nanofiber deposited on the electrode. The deposited nanofiber provides an electrical connection between the electrode and the substrate, serving as the electro-active element in the device. The nanofiber is generally composed of a customized polymer (e.g., polyaniline) that is extremely sensitive to the adsorption and desorption of a single gas molecule. As gas molecules are adsorbed and desorbed, the resistivity of the customized polymer also changes, providing its sensing capacity. When the nanoSSSD device senses a selected gaseous species, the switching portion of the device automatically actuates, sending a signal to the control component. This control component activates the output (warning) device. In addition to its ability to detect harmful gases (including ammonia, hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, and carbon dioxide), Glenn's device can also feature conducting polymers that are sensitive to UV radiation. Glenn's nanoSSSD technology has great commercial potential, particularly in situations where frequent replacement of the switch/sensor is impractical.

Current bulk or thick film solid electrolyte CO2 sensors are expensive, difficult to batch fabricate, and large in size. In contrast, this new amperometric, solid-state, oxide-based electrolyte CO2 microsensor is affordable, easy to fabricate, and is so small that it could easily be integrated onto a substrate the size of a postage stamp. The basic composition of the sensor is identical to a previously designed NASA Glenn technology in which a solid electrolyte of Na3Zr2Si2PO12 is deposited between interdigitated electrodes on an alumina substrate and is covered by Na2CO3/BaCO3. Unlike its predecessor, however, this innovation includes an additional layer of nanocrystalline SnO2 sol gel, an electron donor type (N-type) semiconductor, on top of the Na2CO3/BaCO3 . This new layer provides a greater number of electrons for reduction reaction at the working electrode to detect CO2. As a result, overall performance is enhanced, and this new state-of-the-art sensor has the ability to operate at temperatures as low as 375°C. This low temperature capability significantly decreases the amount of power required to operate the sensor, opening the door to a multitude of new applications that were previously unattainable.

Conventional ambient-temperature oxygen sensors are limited in various ways: optically based sensors can be expensive and challenging to manufacture; electrochemical cells with liquid electrolytes can have limited lifetimes and become leak sources; and both types of sensors are difficult to miniaturize. These problems are addressed with Glenn's novel ambient temperature oxygen microsensor, which is based on a Nafiontm polymer electrolyte, microfabricated using thin-film technologies. In the past, one drawback of Nafiontm film has been that it can lose conductivity when the moisture content in the film is too low, potentially affecting sensor operation. Glenn researchers devised a method to use certain salts to hold water molecules in the Nafiontm film structure at room temperature. The presence of these salts provides extra sites in the film to promote proton (H+) mobility, thus improving film conductivity and overall sensor performance, particularly in arid and high-temperature environments. The innovative use of metal/metal oxide as the reference electrode enables miniaturization by eliminating the reference gas and sealing the reference electrode. The combination of interdigitized electrodes with the unique metal/metal oxide reference electrode permits sensor operation in either potentiometric or amperometric mode, as appropriate. In potentiometric mode, which measures voltage differences between working and reference electrodes in different gases, the voltage differences can be monitored with a voltmeter; however, the sensor itself does not need a power source. In room-temperature testing, the sensor achieved repeatable responses to 21 percent oxygen in nitrogen (using nitrogen as a baseline gas), and also detected oxygen from 7 to 21 percent, making Glenn's breakthrough technology usable for personal health monitoring as well as fire detection, fuel-leak detection, and environmental monitoring.

Glenn's breakthrough technology introduces batch-fabricated, miniature sensors embedded and distributed over a large surface area of a material or product during the manufacturing process. The sensors can be utilized for test instrumentation or as an integrated in-situ monitoring system. This integrated manufacturing approach preserves the structural and mechanical system integrity by eliminating the antiquated plug-in approach, invasive machining, manual insertion, and gluing processes currently required to implant sensors into a material. The sensor ladder network of resistors and capacitors breaks down as result of the thermo-physical effects caused by temperature, shock, radiation, corrosion, or other reactions, causing a change in the electrical properties. A processor interprets these changes in the electrical properties and generates a high-resolution, large-area surface profile. The profile demonstrates the amount or rate of material deterioration and temperature change, and is used to optimize geometric structural design, develop materials, predict performance, and make decisions. These sensors play an important role as industries work to realize material performance and product design. This type of monitoring is ideal for infrastructures, nuclear enclosures, or any system susceptible to surface deterioration.

A typical sensor device includes a set of interdigitated microelectrodes fabricated by photolithography on silicon wafer or an electrically insulating substrate. In preparation for fabricating the SWCNT portion of such a sensor, a batch of treated (coated or doped) SWCNTs is dispersed in a solvent. The resulting suspension of SWCNTs is drop-deposited or injected onto the area containing the interdigitated electrodes. As the solvent evaporates, the SWCNTs form a mesh that connects the electrodes. The density of the SWCNTs in the mesh can be changed by varying the concentration of SWCNTs in the suspension and/or the amount of suspension dropped on the electrode area. To enable acquisition of measurements for comparison and to gain orthogonality in the sensor array, undoped SWCNTs can be similarly formed on another, identical set of interdigitated electrodes. Coating materials tested so far include chlorosulfonated polyethylene. Dopants that have been tested include Pd, Pt, Au, Cu and Rh nanoparticle clusters. To date, the sensor has been tested for NO2, NH3, CH4, Cl2, HCl, toluene, benzene, acetone, formaldehyde and nitrotoulene.